Patent holdings for IPC class H01J 37/21

Total number of patents in this class: 325

10-year publication summary

27
23
22
18
33
27
34
37
32
12
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
Hitachi High-Tech Corporation
4424
61
Hitachi High-Technologies Corporation
2034
30
ASML Netherlands B.V.
6816
29
FEI Company
851
20
Carl Zeiss Microscopy GmbH
1146
16
Applied Materials, Inc.
16587
15
Applied Materials Israel, Ltd.
549
13
Carl Zeiss MultiSEM GmbH
85
10
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
149
9
JEOL Ltd.
556
9
NuFlare Technology, Inc.
770
8
KLA Corporation
1223
8
Hitachi High-Tech Science Corporation
326
5
Carl Zeiss SMT GmbH
2646
4
KLA-Tencor Corporation
2574
4
Hermes Microvision Incorporated B.V.
129
4
TASMIT, Inc.
52
4
Samsung Electronics Co., Ltd.
131630
3
Hitachi, Ltd.
16452
3
Ebara Corporation
1951
3
Other owners 67